Improved Methodology of Cross-Sectional SEM Analysis of Thin-Film …
2023年1月31日 · In this work, an improved methodology of cross-sectional scanning electron microscopy (SEM) analysis of thin-film Ti/V/Ti multilayers was described. Multilayers with various thicknesses of the vanadium middle layer were prepared by magnetron sputtering.
Improved Methodology of Cross-Sectional SEM Analysis of Thin-Film …
2023年1月31日 · The manuscript entitled “Improved Methodology of Cross-sectional SEM Analysis of Thin-film Multilayers prepared by Magnetron Sputtering” by Malwina Sikora et al. presents the various methodology for sample preparation of cross-sectional scanning electron microscopy imaging and analysis.
Cross-sectional imaging of individual layers and buried interfaces …
2012年7月29日 · Here we employ cross sectional TEM to take a side view of several graphene–boron nitride heterostructures. We find that the trapped hydrocarbons segregate into isolated pockets, leaving the...
Preparation of Cross Sections of Difficult Materials for SEM …
2018年5月8日 · Preparing cross sections of particulates and wires for scanning electron microscopy study without inducing mechanical damage is difficult. Embedding materials in commercially available epoxy before polishing with a broad unfocused ion beam is a simple and inexpensive way to produce a cross section with minimal preparation artifacts.
Improved Methodology of Cross-Sectional SEM Analysis of Thin-Film …
2023年1月31日 · In this work, an improved methodology of cross-sectional scanning electron microscopy (SEM) analysis of thin-film Ti/V/Ti multilayers was described. Multilayers with various thicknesses of...
Scanning Electron Microscopy Analysis of Thin Films: A Review
2022年12月16日 · ZnO thin films grown by radio frequency sputtering were studied as a function of the experimental parameters: source power, chamber deposition pressure, substrate temperature and...
Sample preparation matters: Scanning electron microscopic ...
2024年6月1日 · We demonstrate that surface morphology analysis via SEM is significantly affected by coating thickness and accelerating voltage, while cross-sectional images (typically, at much higher magnification) exhibit little difference in morphology. However, improper preparation can damage membranes, compromising cross-sectional imaging.
In-situ Observation of Cross-Sectional Microstructural Changes …
2016年3月7日 · Here, we report the first in-situ characterization of microstructural changes and multi-axial stress distributions in a wedge-indented 9 μm thick nanocrystalline TiN film volume performed using...
Effect on the SEM topography of different sample preparation …
2016年12月20日 · Thin-film-composite (TFC) membrane was prepared through interfacically polymerizing m-phenylene-diamine (MPD) and trimesoyl chloride (TMC) on top of a poly-sulfone substrate to form an ultrathin active polyamide layer, which is excellent in hydrophilicity, mechanical stability, thermal stability and hydrolytic stability.
Cross-sectional thin film characterization of Si compounds in ...
2002年2月22日 · Two EFTEM techniques — elemental mapping and ELNES mapping — were used for cross-sectional thin film characterization of Si compounds in semiconductor device structures. Si, Si 3 N 4 and SiO 2 layers could be clearly differentiated by both elemental mapping and ELNES mapping.