83-88. doi:10.1007/s11082-011-9536-x. Linti, G. The Group 13 Metals Aluminium, Gallium, Indium and Thallium. Chemical Patterns and Peculiarities. Edited Led Bibcode ...
In this work, a fabrication process of thin-film encapsulation (TFE) with aluminum nitride/molybdenum cap is proposed for the packaging of film bulk acoustic wave resonators and filters. The high ...
The aluminum nitride resonator achieved a quality factor of more than 10 million. "This suggests that tensile-strained aluminum nitride could be a powerful new material platform for quantum ...