The Hi-Speed DM37 deformable ... of the mirror is ≤50 nm r.m.s. The clear aperture is 19 mm and the focal length is ≤2,200 mm. The device has a silver coating and 32 electrodes, operates ...

Microelectromechanical systems (MEMS) technology has allowed the realization of cost-effective, high-performance deformable mirrors for adaptive-optics-enhanced imaging. The idea of using an array ...